High-quality epitaxial growth technology, using high-performance commercial MOCVD equipment, through the independent development of new epitaxial growth technology, precise control of epitaxial layer thickness, composition and doping level, strict control of material defects, preparation of high-quality GaAs and InP system epitaxial materials that meet the design. The epitaxial sheet products produced have excellent surface appearance, low defect density, high internal quantum efficiency and photoelectric conversion efficiency, and excellent reliability and life properties. Key parameters such as optical properties, uniformity, interface cleanliness, doping distribution, structural accuracy and defect density of the epitaxial materials were tested and characterized by PL, X-ray, ECV, SIMS and other analytical technologies, and the intracavity loss and internal quantum efficiency of the materials were analyzed to guide the growth of high-quality materials.